ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHODS FOR THE PRODUCTION OF AN ELECTRODE COMB AND A MICROMECHANICAL COMPONENT

摘要

The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.