ULTRAVIOLET-TRANSMITTING MICROWAVE REFLECTOR COMPRISING A MICROMESH SCREEN
摘要
An ultraviolet-transmitting microwave reflector for a substrate processing chamber, comprises a micromesh screen extending across the metallic frame. In one version, the micromesh screen comprises at least one electroformed layer. A method of fabricating the microwave reflector comprises electroforming a metallic frame surrounding a micromesh screen such that the micromesh screen comprises an open area of greater than 80% of the total area.
申请公布号
WO2010048227(A2)
申请公布日期
2010.04.29
申请号
WO2009US61380
申请日期
2009.10.20
申请人
APPLIED MATERIALS, INC.;NGUYEN, TUAN ANH;YANG, YAO-HUNG;BALUJA, SANJEEV;NOWAK, THOMAS;ROCHA-ALVAREZ, JUAN CARLOS
发明人
NGUYEN, TUAN ANH;YANG, YAO-HUNG;BALUJA, SANJEEV;NOWAK, THOMAS;ROCHA-ALVAREZ, JUAN CARLOS