发明名称 |
CONTACTOR AND METHOD OF PRODUCTION OF CONTACTOR |
摘要 |
A contactor includes: a silicon layer composing a part of beam part with a rear end side provided at a base part and with a front end side sticking out from the base part; SiO2 layer as an insulating layer formed on the silicon layer; and a conductive layer formed on the SiO2 layer.
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申请公布号 |
US2010102838(A1) |
申请公布日期 |
2010.04.29 |
申请号 |
US20080532928 |
申请日期 |
2008.03.12 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
KITAZUME HIDENORI;ASANO KOJI |
分类号 |
H01R13/02;G01R31/02;H01R13/03;H01R43/16 |
主分类号 |
H01R13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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