LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD,申请号US20090579065-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号	US2010103390(A1)	申请公布日期	2010.04.29
申请号	US20090579065	申请日期	2009.10.14
申请人	ASML NETHERLANDS B.V.	发明人	LAFARRE RAYMOND WILHELMUS LOUIS;VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS;ZUIDEMA PATRICK
分类号	G03B27/52	主分类号	G03B27/52
代理机构		代理人
主权项
地址

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