A load lock chamber sized for a large area substrate is provided. The load lock chamber includes a housing comprising a door and a body having at least two sealable ports, a movable door associated with at least one of the sealable ports, and a door actuation assembly coupled between the door and the housing. The door actuation assembly further includes a pair of first actuators coupled to the door for moving the door in a first direction, and a pair of second actuators for moving the door in a second direction that is orthogonal to the first direction.
申请公布号
WO2010048001(A2)
申请公布日期
2010.04.29
申请号
WO2009US60511
申请日期
2009.10.13
申请人
APPLIED MATERIALS, INC.;NGUYEN, HUNG T.;TZENG, GEORGE;HANDJOJO, DANIEL I.;NGUYEN, LAWRENCE T.;CEREZO, JONATHAN
发明人
NGUYEN, HUNG T.;TZENG, GEORGE;HANDJOJO, DANIEL I.;NGUYEN, LAWRENCE T.;CEREZO, JONATHAN