INK-JET HEAD AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An ink-jet head and a manufacturing method thereof are provided to manufacture the ink-jet head with an excellent anodic bonding mode by welding each processed layer, and to improve productivity of components. CONSTITUTION: A manufacturing method of an ink-jet head includes the following steps: interposing an insulating layer between a silicon layer and a lower silicon layer; preparing an SOI substrate in which the insulating layer is interposed; etching the lower silicon layer(23) to correspond on the top of a chamber(12), a restrictor(14), and a reservoir(13); etching an upper silicon layer(21); processing a first plate(30) made of a glass material; and processing a second plate(40) made of a silicon material.