| 摘要 |
<p>PURPOSE: A solar cell and a manufacturing method thereof are provided to form an intrinsic semiconductor layer with uniform thickness using a plasma chemical vapor deposition device with a separation electrode structure. CONSTITUTION: A solar battery(100) comprises a semiconductor substrate(110), a first intrinsic semiconductor layer(120), a first impurity doping semiconductor layer(130), a transparent electrode(140), and a rear electrode(150). The first intrinsic semiconductor layer is formed on the first side of the semiconductor substrate and is made of the material with a large band gap energy. The first impurity doping semiconductor layer is formed on the first intrinsic semiconductor layer. The transparent electrode is formed on the first impurity doping semiconductor layer. The rear electrode is formed on the second surface opposite to the first surface of the semiconductor layer.</p> |
