发明名称 LOCATION CALIBRATING APPARATUS
摘要 PURPOSE: An apparatus for calibrating the location of an object is provided to stably transfer an object by including electromagnets which form a magnetic path to be overlap to or be separated from a magnetic force from a permanent magnet. CONSTITUTION: An object has a ring shape. A support unit supports the object to be transferable. A rod type core(12) is installed to the inside of the object and is fixed by a fixing unit. An air gap is formed between the core and the inner wall of the object. A permanent magnet(13) is installed to the center of the core. Electromagnets(14) are installed on the both side of the permanent magnet and generate magnetic force.
申请公布号 KR20100043553(A) 申请公布日期 2010.04.29
申请号 KR20080102637 申请日期 2008.10.20
申请人 KNU-INDUSTRY COOPERATION FOUNDATION 发明人 CHANG, IN BAE
分类号 H01L21/68 主分类号 H01L21/68
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