APPARAUTS FOR SIMULTANEOUSLY MEASURING LASER CONCENTRICITY AND PERPENDICULARITY USING CORNER CUBE PRISM AND WAVELENGTH PLATE

摘要

PURPOSE: A device for measuring concentricity and perpendicularity using a corner cube prism and a wavelength plate is provided to measure the concentricity by detecting an electric signal corresponding to location and quantity of reflection light. CONSTITUTION: A device for measuring concentricity and perpendicularity using a corner cube prism and a wavelength plate includes a laser source part(11), a wavelength plate(23), a reflective unit, and a signal detecting unit. The laser source part generates laser light polarized to a sample. The wavelength plate ahs an incident surface(23a) in which laser light partially reflects. The reflective unit includes the corner cube prism(21). The signal detecting unit detects the reflective light with an electric signal.