METHOD FOR AN IMPROVED CHECKING OF REPEATABILITY AND REPRODUCIBILITY OF A MEASURING CHAIN, IN PARTICULAR FOR THE QUALITY CONTROL BY MEANS OF THE SEMICONDUCTOR DEVICE TESTING

摘要

The invention relates to a method for an improved checking of repeatability and reproducibility of a measuring chain, in particular for the quality control by means of the semiconductor device testing, wherein testing steps are provided for multiple and different devices to be subjected to measurement through a measuring system comprising at least one concatenation of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement. Advantageously, the method comprises the following steps: checking repeatability and reproducibility of each type of unit that forms part of the measuring chain of the concatenation; then making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement.