| 摘要 |
<p>Provided are a method and an apparatus which can determine which attracting electrode has a capacitance abnormality at the periphery thereof in a bipolar electrostatic chuck. In the inspection method, a positive auxiliary electrode (12) and a negative auxiliary electrode (14) are arranged in a dielectric body (6) of an electrostatic chuck (4), and the auxiliary electrodes are connected to a ground potential section. Then, transient currents of currents (I1-I4) flowing in the attracting electrodes (8, 10) and the auxiliary electrodes (12, 14) are measured when direct voltages (+V, -V) from a chuck power supply (26) to the electrostatic chuck (4) are applied or interrupted in a state where a subject to be attracted (2) is not mounted, and a transient current of a current (I5) (=I1-I2 or I3-I4) is calculated. Then, the obtained transient currents are compared with predetermined reference values, respectively, and a capacitance abnormality in the electrostatic chuck (4) is determined.</p> |
