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发明名称
Extreme ultraviolet light source device and extreme ultraviolet radiation generating method
摘要
申请公布号
EP1976344(A3)
申请公布日期
2010.04.28
申请号
EP20080005656
申请日期
2008.03.26
申请人
TOKYO INSTITUTE OF TECHNOLOGY;USHIO DENKI KABUSHIKI KAISHA
发明人
HOSOKAI, TOMONAO;HORIOKA, KAZUHIKO;MIZOKOSHI, HIROSHI;YOKOYAMA, TAKUMA;SEKI, KYOHEI
分类号
H05G2/00
主分类号
H05G2/00
代理机构
代理人
主权项
地址
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