发明名称 |
METHOD OF TREATING A TRANSPORT SUPPORT FOR THE ATMOSPHERIC STORAGE AND CONVEYANCE OF SEMICONDUCTOR SUBSTRATES |
摘要 |
The aim of the invention is to provide a method for the treatment of a transport support (1) for the conveyance and storage of semiconductor substrates, with said support (1) possibly having first undergone a cleaning operation using a liquid. The method includes a treatment stage in which the transport support (1) is placed in a sealed chamber (4) connected to a vacuum pump (5) and said transport support (1) is subjected to the combined action of a subatmospheric pressure and infrared radiation to favor the removal of foreign bodies on the walls of the transport support (1). The invention also concerns a treatment station for a transport support (1) for implementation of the method. |
申请公布号 |
EP2179236(A1) |
申请公布日期 |
2010.04.28 |
申请号 |
EP20080787122 |
申请日期 |
2008.08.11 |
申请人 |
ALCATEL LUCENT |
发明人 |
GODOT, ERWAN;THOLLOT, REMI;FAVRE, ARNAUD |
分类号 |
F26B5/04;F26B25/22;H01L21/67;H01L21/673;H01L21/677 |
主分类号 |
F26B5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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