发明名称 Epitaxial semiconductor layer and method
摘要 A method for epitaxially forming a first semiconductor structure attached to a second semiconductor structure is provided. Devices and methods described include advantages such as reduced lattice mismatch at an epitaxial interface between two different semiconductor materials. One advantageous application of such an interface includes an electrical-optical communication structure. Methods such as deposition of layers at an elevated temperature provide easy formation of semiconductor structures with a modified lattice constant that permits an improved epitaxial interface.
申请公布号 US7705429(B2) 申请公布日期 2010.04.27
申请号 US20090364073 申请日期 2009.02.02
申请人 MICRON TECHNOLOGY, INC. 发明人 FARRAR PAUL A.
分类号 H01L29/207;H01L21/04;H01L21/265;H01L21/762;H01L29/167;H01L29/227 主分类号 H01L29/207
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