INSERT LAYER-BUILT METHOD TO EVENNESS REGULATION-BODY OF EVENNESS EQUIPMENT AND EVENNESS EQUIPMENT TO PROBE-CARD TEST FOR SEMICONDUCTOR WAFER

摘要

PURPOSE: The planarization apparatus of a probe-card for testing a semiconductor wafer and a method for insert-stacking a planarization adjustment part of the same are provided to prevent the planarization adjustment part from separating from a measurement unit by compressing a first layer and a second layer with a press in order to form the measurement unit. CONSTITUTION: A plurality of measurement pins is formed on the lower side of a measurement unit(10). A plurality of contact pins is formed on the upper side of the measurement unit. Screw threads are formed in a plurality of planarization adjustment parts. The planarization adjustment parts are inserted in the upper side of the measurement unit using an insert-stacking method. The planarization adjustment unit(60) passes through a support unit(50) and is combined to the planarization adjustment parts. A fixing unit(30) is formed on the external lower side of a connector unit(40) and fixes the measurement unit to the connector unit.