| 摘要 |
Two-coordinate AO laser scanner for 355 and 266-nm UV wavebands utilizing AO cells with specially shaped TeO2 and KDP AO crystals, and equipped with LiNbO3 pulse-fed transducers of special configuration that allows enlarging scanning angle. This technology is utilized in computer-controlled UV laser analyzer of micro-objects, which performs florescent and reflected light analysis of any chosen micro-spot of a sample, and UV laser micro-machining unit that can process a sample with simultaneous control of the operation by built-in CCD camera. The technical solution utilized in the analyzer and micro-machining unit allows precisely matching coordinates of the processed sample and CCD matrix.
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