MULTIBEAM ACCELEROMETRE - ANALYZER OF MECHANICAL OSCILLATIONS SPECTRUM BASED ON PIEZORESISTIVE CONVERTERS

摘要

FIELD: measurement technique. ^ SUBSTANCE: invention refers to semiconductor devices for converting mechanical impacts into electrical signal the measurement of which makes possible to determine acceleration or impact force. Accelerometre contains several movable inertial masses, concentrators of different length or width, jumpers between inertial masses or concentrators with different position located identically relative to main measuring axis. Sensitivity is raised due to measuring each of resonance structures on resonance frequency. Resonance mode provides maximum sensitivity. Measuring circuit is tuned to resonance frequency of each given inertial mass which provides obtaining spectral characteristic of acting mechanical oscillations. ^ EFFECT: improvement of measurement sensitivity. ^ 3 cl, 6 dwg