APPARATUS FOR SUPPLYING TREATMENT LIQUID

摘要

PURPOSE: A process solution supply device is provided to compensate for a temperature of the process solution with high temperature by installing a heating coil in a supply line. CONSTITUTION: A supply line supplies a process solution with high temperature suitable for a process condition to a nozzle. A temperature sensor(112) is installed between the supply line and the nozzle and measures the temperature of the process solution. A heating coil(110) is installed on the outer circumference of the supply line and controls the temperature of the process solution. A controller(102) controls the heating coil to make the temperature of the process solution suitable for a process condition corresponding to the temperature of the process solution from a temperature sensor.