发明名称 |
Plate member, substrate holding device, exposure apparatus and method, and device manufacturing method |
摘要 |
A substrate holder PH includes a first holder PH1 which holds a substrate P, a liquid-repellent inner surface Tc of a plate member T which faces a side surface Pc of the substrate P held on the first holder PH1 via a predetermined gap A, and a chamfered portion C provided on an upper portion of the inner surface Tc. On the side surface Pc of the substrate P, a liquid-repellent area is provided, and the chamfered portion C is provided so as to face the liquid-repellent area of the substrate P held on the first holder PH1. Thereby, a substrate holding device which can restrain inflow of the liquid into the back surface side of the substrate is provided.
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申请公布号 |
US7705968(B2) |
申请公布日期 |
2010.04.27 |
申请号 |
US20060594963 |
申请日期 |
2006.03.20 |
申请人 |
NIKON CORPORATION |
发明人 |
NAGASAKA HIROYUKI;FUJIWARA TOMOHARU |
分类号 |
G03B27/58;G03B27/42;G03B27/52 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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