发明名称 Semiconductor devices and methods of forming interconnection lines therein
摘要 An example disclosed semiconductor device includes a semiconductor substrate, a lower interlayer insulating layer formed on the substrate, a lower wire formed on the lower interlayer insulating layer, and an upper interlayer insulating layer which is formed on the lower interlayer insulating layer and has a via hole to expose the lower wire. The lower wire includes a metal layer pattern and a conductive layer pattern, and the metal layer pattern has a protruding portion and the conductive layer pattern is formed on the upper part of the protruding portion of the metal layer pattern and has a hole to expose the protruding portion.
申请公布号 US7705459(B2) 申请公布日期 2010.04.27
申请号 US20080196263 申请日期 2008.08.21
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM SANG-KWON
分类号 H01L29/40 主分类号 H01L29/40
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