A GRAPHITE CRUCIBLE FOR SILICON ELECTROMAGNETIC INDUCTION HEATING AND APPARATUS FOR SILICON MELTING AND REFINING USING THE GRAPHITE CRUCIBLE

摘要

PURPOSE: A graphite crucible for a silicon electromagnetic induction melting and a silicon melting refining device using the same are provided to melt a semiconductor with high efficiency by applying an indirect melting method using the heat of a crucible and a direct melting method using the electromagnetic induction. CONSTITUTION: The upper side of a graphite crucible(300) is open and the graphite crucible receives a silicon material. The crucible has a cylindrical structure with the outer wall surrounded with an induction coil(301). The electromagnetic force generated by a current flowing in the induction coil acts to the inner central direction of the crucible. A plurality of slits(310) passes through the outer wall and the inner wall of the crucible to prevent the melt silicon from contacting with the inner wall of the crucible due to the electromagnetic force.