SEMICONDUCTOR MANUFACTURING EQUIPMENT AND METHOD OF CONTROLING THE SAME

摘要

PURPOSE: A semiconductor manufacturing facility and a control method thereof are provided to reduce a wafer holing time in a process unit by properly maintaining an input interval between a preceding wafer and a following wafer. CONSTITUTION: A work processor(130) is composed of a plurality of process units. A transfer unit(120) successively transfers wafers accepted in a receiving unit to the work processor and transfers the wafer processed by the process unit. A control unit sets a proper skip cycle based on the number of process units and a process sequence. The control unit controls the operation of the transfer unit to input the following wafer to the process unit if the time elapses corresponding to the skip cycle after inputting the preceding wafer.