| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing photovoltaic devices for suppressing electric short-circuiting between a back electrode and an intermediate layer even if the conductive intermediate layer exists among a plurality of photoelectric conversion layers. <P>SOLUTION: On a substrate 2, first and second substrate side electrodes 3a, 3b formed by separating a substrate side electrode 3 by a first open groove 3c, the first photoelectric conversion layer 4, the intermediate layer 5, and the second photoelectric conversion layer 6 are formed. A light transmitting conductive layer 7 is formed on the second photoelectric conversion layer 6. After that, on the first substrate side electrode 3a, an insulating member 8 is formed, while covering the cut section of the intermediate layer 5 and extending along an upper portion of the light transmitting conductive layer 7, in a second open groove 10a for cutting the intermediate layer 5, the second photoelectric conversion layer 6, and the light transmitting conductive layer 7, and then the back electrode 9 is formed, which passes through the first photoelectric conversion layer 4, the intermediate layer 5, the second photoelectric conversion layer 6, and the light transmitting conductive layer 7 and electrically connects the first substrate side electrode 3a to the second photoelectric conversion layer 6 on the side of the second substrate side electrode 3b via a third open groove 10b to which the surface of the first substrate side electrode 3a is exposed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
