MASK CLEANING DEVICE FOR ORGANIC EL, MANUFACTURING DEVICE OF ORGANIC EL-DISPLAY, ORGANIC EL-DISPLAY, AND MASK CLEANING METHOD FOR ORGANIC EL

摘要

PROBLEM TO BE SOLVED: To remove deposition in a complete noncontact state against a substrate, and prevent a liberated product from adhering to the rear face of a mask for an organic EL when carrying out cleaning to remove the deposition adhered to the mask for the organic EL. SOLUTION: Laser is irradiated on a surface 2S of the mask 2 for the organic EL, the deposition VM is fractured, formed liberated products are scattered upward, and the liberated products are removed by a transportation air flow CF formed at a position separated from the surface of the mask 2 for the organic EL. At this time, by forming an upward air flow UF toward the surface 2S from the rear face 2R against numerous openings 2C formed in the mask 2R for the organic EL, dropped liberated products are prevented from turning in around to the rear face of the mask 2 for the organic EL. COPYRIGHT: (C)2010,JPO&INPIT