| 摘要 |
PROBLEM TO BE SOLVED: To efficiently distribute reference data while minimizing a distribution time of the reference data in a conveying system conveying cargo such as various substrates for the manufacturing of a semiconductor device. SOLUTION: The conveying system 100 is equipped with a data generating means 11 for generating correction data being a reference data portion reflected with the correction of the reference data regarding a track 1, a distributing means 12 for distributing the generated correction data by a broadcast method, a transport vehicle capable of conveying the cargo along the track, a communication means for receiving the distribute correction data, a conveyance control means 4 for carrying out conveyance in accordance with the reference data which can be updated by the received correction data, a plurality of conveying means 3 equipped with an error detection means 6 detecting an error regarding the communication of the received correction data, and a redistribution control means 13 for redistributing the generated correction data when the error is detected. COPYRIGHT: (C)2010,JPO&INPIT
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