发明名称 |
METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM |
摘要 |
An inspection region is specified using the design information to perform region division for measurement through a scatterometry method. The obtained detection data is classified by pattern into a periodic region and a non-periodic region. A spectroscopic characteristic is detected by an optical sensor to extract features. The extracted features are compared with features stored in a feature map database for each region to evaluate a state of a patterned medium.
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申请公布号 |
US2010098320(A1) |
申请公布日期 |
2010.04.22 |
申请号 |
US20090482126 |
申请日期 |
2009.06.10 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SASAZAWA HIDEAKI;HIROSE TAKENORI;YOSHIDA MINORU;SAITO KEIYA;SERIKAWA SHIGERU |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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