| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro movable element suitable for suppressing variation of a spring constant of a connection part which connects a frame with a movable part, and also to provide an optical switching device having the micro movable element. <P>SOLUTION: The micro movable element X1 includes a micro movable substrate S1 in which the frame 30, the movable part 20, and the connection part 42 for connecting these are formed, a support base material S2, a plurality of spacers 90A, 90B interposed between the frame 30 of the micro movable substrate S1 and the support base material S2 and joined to the frame 30 and the support base material S2, and at least one strong fixation part 90C having spacer parts 91C, 92 interposed between the frame 30 and the support base material S2 and joined to the frame 30 and the support base material S2 and an adhesive part 93 covering the spacer parts and joined to the frame 30 and the support base material S2. The strong fixation part 90C is positioned between the two spacers 90A, 90B. <P>COPYRIGHT: (C)2010,JPO&INPIT |
