| 发明名称 |
Double Sidewall Angle Nano-Imprint Template |
| 摘要 |
The present application describes a template with feature profiles that have multiple sidewall angles. The multiple sidewall angles facilitate control over critical dimensions and reduce issues related to template release.
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| 申请公布号 |
US2010095862(A1) |
申请公布日期 |
2010.04.22 |
| 申请号 |
US20090582471 |
申请日期 |
2009.10.20 |
| 申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
MILLER MICHAEL N.;COWHER JOHN THOMAS;BROOKS CYNTHIA B.;LABRAKE DWAYNE L. |
| 分类号 |
B41N1/00;B41N3/00 |
主分类号 |
B41N1/00 |
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