| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for the purpose of appropriately setting the acquisition condition of a search area when performing pattern recognition by a template. SOLUTION: In the method of determining the magnification of an image to be searched in pattern search, the first image of a first magnification obtained by scanning a charged particle beam is acquired, the second image of a second magnification lower than the first magnification, including a pattern image displayed in the first image, is acquired, sizes between the first image and a third image for which a part of the second image is segmented are matched, and when a correlation value between both is equal to or larger than a prescribed value, the second magnification is set as the magnification when acquiring the image to be searched in the pattern search. COPYRIGHT: (C)2010,JPO&INPIT |
