发明名称 APPARATUS FOR TRANSFERRING SUBSTRATE
摘要 PURPOSE: An apparatus for transferring a substrate is provided to simplify the structure of the apparatus by installing one upper roller on one shaft in order to prevent the increase of the length of the shaft. CONSTITUTION: An arm(300) is ratably combined to a first shaft(310) which is fixed to a stand(200). An upper roller(400) is located on the upper side of a transfer roller(100). A gap adjustment unit is contacted to the other upper side of the arm. The gap adjustment unit adjusts the gap between the upper roller and the transfer roller. A load adjustment unit(600) adjusts a load which is applied to a substrate(S). The load adjustment unit includes a guide beam(610) and a main body(620). The guide beam is expanded to a horizontal direction. The main body of the load adjustment unit is horizontally transferred with the guide beam.
申请公布号 KR20100041063(A) 申请公布日期 2010.04.22
申请号 KR20080100053 申请日期 2008.10.13
申请人 SHBAURA MECHATRONICS KOREA CO., LTD. 发明人 JUNG, SUNG TAE;NAGAYAMA YUKIO
分类号 H01L21/68;B65G49/07 主分类号 H01L21/68
代理机构 代理人
主权项
地址