| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid jetting head capable of easily forming droplet shapes. Ž<P>SOLUTION: The manufacturing method of the liquid jetting head 100 includes: the step of preparing a matrix substrate 1; the step of forming a first substrate 10 on the matrix substrate 1 by using a first mask layer R1 as a mask; the step of forming a second substrate 20 on the first substrate 10 by using a second mask layer R2 as a mask; the step of removing the first mask layer R1, the second mask layer R2, and the matrix substrate 1, forming a nozzle hole 12 in the first substrate 10, and forming an opening part 22 in the second substrate 20, wherein the opening is communicated with the nozzle hole 12; the step of subjecting the upper surface 10b and the lower surface 10a of the first substrate 10, the side surface 10c of the first substrate 10 defining the nozzle hole 12, and the side surface 20a of the second substrate 20 defining the opening part 22 to liquid-repelling treatment; and the step of forming an oscillation plate 30 and a piezoelectric element 40 on the opening part 22. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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