SURFACE TREATMENT METHOD OF RESIST PATTERN AND RESIST PATTERN FORMING METHOD USING THE SURFACE TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment method of a resist pattern which meets the requirement that the line width and LWR (Line Width Roughness) of a first resist pattern are not varied by the freezing of the first resist pattern and the formation of a second resist pattern in a double patterning method.

SOLUTION: The surface treatment method comprises bringing a resist pattern formed from a resin containing a specific lactone structure and a compound having two or more nucleophilic functional groups per molecule into a solid phase-gas phase reaction.

COPYRIGHT: (C)2010,JPO&INPIT