发明名称 MOLDED PRODUCT HOLDING APPARATUS, MOLD HOLDING APPARATUS AND TRANSFER APPARATUS
摘要 PROBLEM TO BE SOLVED: To suppress the occurrence of a transfer defect when transferring a fine transfer pattern formed on a planar portion of a mold to one surface in a thickness direction of a planar molded product. SOLUTION: A molded product holding apparatus 5 for holding a molded product W when transferring a fine transfer pattern formed on a mold M to the molded product W includes: a molded project holding body 15 which is formed like a plate and holds the molded product W on the center portion of one surface in the thickness direction; a base member 17 which is formed like a plate and arranged separately from the molded product holding body 15; and a cushioning material 19 sandwiched between the molded product holding body 15 and the base member 17 and formed on the center portion of the molded product holding body 15 when viewing the cushioning material from the thickness direction of the molded product holding material 15. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010093105(A) 申请公布日期 2010.04.22
申请号 JP20080262634 申请日期 2008.10.09
申请人 TOSHIBA MACH CO LTD 发明人 ITANI SHINYA;ISHIBASHI KENTARO;TASHIRO TAKAHARU;FUJIWARA SHIGERU
分类号 H01L21/027 主分类号 H01L21/027
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