| 摘要 |
<p>PURPOSE: A substrate transfer system is provided to increase the loading efficiency of substrates by reducing the gap between substrates and the size of a cassette, in which a plurality of substrates are loaded. CONSTITUTION: A conveyor is installed on one side of a main frame(100). A lifter(300) includes elevation shafts(310) and a support(320). The elevation shafts are installed on the both side of the main frame. The supporter is elevated with the elevation shaft. A plurality of substrate are loaded in a cassette(400) which is mounted on the supporter. A driving unit(500) is fixed to the elevation shafts and transfers the substrate to the conveyor.</p> |
