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发明名称
Vorrichtung und Verfahren, um Wafer einer Flüssigkeit auszusetzen
摘要
申请公布号
DE112008001312(T5)
申请公布日期
2010.04.22
申请号
DE200811001312T
申请日期
2008.05.15
申请人
RENEWABLE ENERGY CORPORATION ASA
发明人
SAUAR, ERIK;STEEMAN, ROBERTUS ANTONIUS
分类号
H01L21/677;B65G15/44;B65G49/04;B65G49/07
主分类号
H01L21/677
代理机构
代理人
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地址
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