| 摘要 |
<P>PROBLEM TO BE SOLVED: To remove fuel debris before arriving at a radiation collector. <P>SOLUTION: A radiation source is configured so as to generate extreme ultraviolet radiation. A radiation source includes a chamber, a fuel supply configured to supply a fuel to a plasma formation region in the chamber, and a laser configured to emit a radiation beam to the plasma formation region so that plasma for emitting extreme ultraviolet radiation is generated when the radiation beam impacts the fuel. A fuel particulate interceptor is arranged in the chamber and includes a material having affinity with the fuel so that when the fuel particulates impact a surface of the fuel particulate interceptor, the fuel particulates are stuck to the surface. The fuel particulate interceptor is configured against a reflective element so as to prevent all fuel particulates from falling onto the reflective element due to the influence of gravity. <P>COPYRIGHT: (C)2010,JPO&INPIT |
