发明名称 HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY
摘要 A system contains a first actuator half containing a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a first metallic backing. A second actuator half is also providing within the system, which contains a first pair of actuator coils and a second pair of actuator coils located above the first pair of actuator coils, wherein the first pair of actuator coils is connected to a second metallic backing. The system also contains a mechanical flexure suspension having at least one flexure supporting a permanent magnet that is capable of moving, wherein the mechanical flexure suspension is located between the first actuator half and the second actuator half.
申请公布号 US2010100990(A1) 申请公布日期 2010.04.22
申请号 US20090581135 申请日期 2009.10.17
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 TRUMPER DAVID L.;MACKENZIE IAN
分类号 G01Q30/00;G01Q70/02 主分类号 G01Q30/00
代理机构 代理人
主权项
地址