发明名称 |
Method for determining position of material edges on or at mask for semiconductor production, involves carrying multiple different elements by mask, where elements are made of different materials |
摘要 |
<p>The method involves carrying multiple different elements by a mask (2) and placing a coordinate measuring machine (1) into a measuring table. The elements are made of different materials. The position of two material edges is determined by a detection system.</p> |
申请公布号 |
DE102008037465(A1) |
申请公布日期 |
2010.04.22 |
申请号 |
DE20081037465 |
申请日期 |
2008.10.17 |
申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
LASKE, FRANK;FRICKE, WOLFGANG |
分类号 |
G01B11/03;G01B11/24 |
主分类号 |
G01B11/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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