| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding tool of a sheet-like member facilitating handling of the sheet-like member on which a fine transfer pattern is formed or transferred, and to provide a device of mounting the sheet-like member and a method of mounting the sheet-like member. SOLUTION: In the holding tool 1 of the sheet-like member which holds the sheet-like member W on which the fine transfer pattern is formed or transferred, the sheet-like member W is held by pinching at least the periphery thereof with sheet-like member-holding bodies 27 and 29 of a sheet-like member-holding means 19 and tilting surfaces 23 and 25 of a base member 17. COPYRIGHT: (C)2010,JPO&INPIT |
