METHOD FOR MANUFACTURING RADIATION DETECTOR AND RADIATION DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an X-ray detector 11 which can restrain the warping of organic resin associated with its hardening and the delamination of a phosphor film 13 while forming an organic resin film 14 uniformly.

SOLUTION: A photoelectric conversion substrate 12 is flattened along with the phosphor film 13, and a fluid organic resin is applied on the phosphor film 13 and is provisionally hardened to a prescribed viscosity. The organic resin can be applied uniformly on the photoelectric conversion substrate 12 and the flow of the organic resin can also be restrained when the photoelectric conversion substrate 12 is bent along with the phosphor film 13. The hardening of the organic resin being bent offsets the contraction stress in the hardening of the organic resin and can restrain its warping due to its hardening and the delamination of the phosphor film 13 while forming the organic resin film 14 uniformly.

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