发明名称 |
ARC DISCHARGE APPARATUS, APPARATUS AND METHOD FOR MANUFACTURING VITREOUS SILICA GLASS CRUCIBLE, AND METHOD FOR PULLING UP SILICON SINGLE CRYSTAL |
摘要 |
The arc discharge apparatus comprises a plurality of carbon electrodes connected to respective phases of a power supply for heating a silica powder and causing it to fuse by generating arc discharge between the carbon electrodes. All of the carbon electrodes have a density in a range from 1.30 g/cm3 to 1.80 g/cm3, and variability in density among the carbon electrodes is 0.2 g/cm3 or less. The carbon particles that constitute the carbon electrodes preferably have a particle diameter of 0.3 mm or less.
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申请公布号 |
US2010095881(A1) |
申请公布日期 |
2010.04.22 |
申请号 |
US20080253500 |
申请日期 |
2008.10.17 |
申请人 |
JAPAN SUPER QUARTZ CORPORATION;SUMCO CORPORATION |
发明人 |
FUKUI MASANORI;SUZUKI KOICHI;FUJITA TAKESHI |
分类号 |
C30B15/00;C25B11/12;C30B15/10 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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地址 |
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