发明名称 APPARATUS AND METHOD FOR ACTIVE VOLTAGE COMPENSATION
摘要 A voltage compensation assembly adapted for apparatus having a prober for contacting the electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation, and a voltage measuring unit connected to the controller and for measuring a voltage on the substrate.
申请公布号 US2010097086(A1) 申请公布日期 2010.04.22
申请号 US20090582909 申请日期 2009.10.21
申请人 APPLIED MATERIALS, INC. 发明人 MUELLER BERNHARD
分类号 G01R31/02;G05F5/00 主分类号 G01R31/02
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