| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance detection accuracy of a physical quantity by a MEMS sensor. <P>SOLUTION: A method of manufacturing the MEMS sensor including a support part, a beam part having one end coupled to the support part and thinner than the support part, a weight part coupled to the other end of the beam part and thicker than the beam part, and a strain detection means provided at the beam part and detecting the strain of the beam part includes the steps of: forming a laminate structure including the strain detection means including films made by laminating the films on a surface of a substrate and the substrate; forming a first protective film having a first through-hole formed therein and a second protective film having a second through-hole formed therein on the back surface of the substrate; etching the laminate structure exposed from the first through-hole so that the laminate structure is penetrated, thereby forming a side surface of the beam part and a part of a side surface of the weight part separated from the beam part; and etching the substrate exposed from the second through-hole, thereby adjusting the thickness of the beam part and forming the residual part of the side surface of the weight part made of the substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
