| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid processing device and a liquid processing method adapted to perform uniform liquid processing for a short period while consecutively conveying substrates in a horizontal state and uniformly applying a processing liquid to a surface of each substrate or immersing the substrate in the liquid. Ž<P>SOLUTION: The liquid processing device includes: a first conveying belt 1 for belt-conveying the substrate, immersing it in the processing liquid, and throwing the substrate into the processing liquid in a liquid processing tank; a second conveying belt 2 for conveying the substrate horizontally in the processing liquid, which has been transferred from the first conveying belt, and immersing the substrate in the processing liquid; and a third conveying belt 3 for receiving the substrate from the second conveying belt and ejecting it from the liquid processing tank. In the liquid processing device and the liquid processing method, the first, second and third conveying belts have different conveying speeds. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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