| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and system for controlling a process by using a material process-tool and a performance data. <P>SOLUTION: A system for processing a material (1) includes a process-tool (10) and a process-performance controlling system (100). The process-performance controlling system (100) includes a process-performance controller (55) coupled to the process-tool (10). The process-performance controller (55) includes a process-performance predicting model (110), a process-method correcting filter (120), a process controller (130), and a process-performance model correcting algorithm (150). The process-performance predicting model (110) is constituted so as to receive tool-data from a plurality of sensors coupled to the process-tool (10) and predict a process-performance data. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
