发明名称 FLUID CONTROL APPARATUS
摘要 There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication device 4 to be replaced with a relatively-higher frequency is coupled to a base block 5 existing thereunder through male screw members 17 from above. An on-off valve 6 to be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main body 6a formed integrally therewith. The main body 6a of the on-off valve 6 is coupled to the base block 5 through male screw members 18 in the forward and rearward directions.
申请公布号 US2010096031(A1) 申请公布日期 2010.04.22
申请号 US20080451649 申请日期 2008.05.26
申请人 TOKYO ELECTRON LIMITED 发明人 OKASE WATARU;MORIYA SHUJI;NAKATA TOMOHIRO;SHINOHARA TSUTOMU;YAMAJI MICHIO
分类号 G05D7/00;F16K27/00;F17D1/04 主分类号 G05D7/00
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