| 摘要 |
A method of semiconductor wafer fabrication. The wafer is fabricated by receiving a semiconductor wafer having a substrate layer and at least one processed layer, cutting a trench into the wafer, wherein the trench penetrates through the at least one processed layer and only partially through the thickness of the substrate layer, and depositing a passivation layer over the at least one processed layer such that the trench is filled with the passivation material. |
