| 摘要 |
PROBLEM TO BE SOLVED: To provide an article forming method capable of reducing local stress concentration on a contact surface compared with a case not having this constitution. SOLUTION: A method for manufacturing a very small structure comprises a first step of holding a donor substrate 200 having a first thin film 202A, a second thin film 202B and a third thin film 202C by a stage 12, and holding a target substrate 100 by a substrate holder 5, and a second step of successively peeling the first thin film 202A, the second thin film 202B and the third thin film 202C from the donor substrate 200 by relatively moving the stage 12 and the substrate holder 5 to each other, and joining and laminating them on the target substrate 100. When executing the second step, a warp 110 is formed in the target substrate 100 in an elastically restoring manner to swell the target substrate 100 in a projecting manner to the side of the donor substrate 200. COPYRIGHT: (C)2010,JPO&INPIT |
