| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Micro Electro-Mechanical System (MEMS) accelerometer and an acceleration detection method having improved sensitivity, a greater signal to noise ratio, and lower power. <P>SOLUTION: The MEMS accelerometer includes a proof mass 42 suspended by at least one hinge type flexure 44, planar coils 46, 48 located on the proof mass 42, and magnets 50, 52 positioned such that a magnetic flux field passes through the coils at a magnetic flux angle in a range of approximately 30-60° relative to the coil plane. In an exemplary embodiment, the angle is approximately 45°. The magnets include the first annular magnet 50 positioned on a first side of the proof mass 42 and the second annular magnet 52 positioned on a second side of the proof mass 42. Capacitance of a pickoff in the MEMS accelerometer is detected. The MEMS accelerometer is rebalanced by sending currents through the planar coils 46, 48. <P>COPYRIGHT: (C)2010,JPO&INPIT |
