| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow control device capable of suppressing the corrosion of a regulator which adjusts the operation pressure of a flow control valve by controlling the supply/discharge of gas to/from the flow control valve. <P>SOLUTION: The flow control device includes: a pilot regulator 20 which includes a diaphragm, and applies operation pressure by air supplied to the other side of the diaphragm; and an electropneumatic regulator 18 which adjusts the operation pressure by controlling the supply/discharge of air to/from the pilot regulator 20. The flow control device includes: an air passage 15 which connects the pilot regulator 20 and the electropneumatic regulator 18 for the circulation of air; and an orifice 40 which discharges air from the air passage 15 while enabling the adjustment of the operation pressure by the electropneumatic regulator 18. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
